Description:
MKS RF Matchers (also called RF matching boxes/networks) are high-performance automatic impedance matching devices engineered for semiconductor and industrial plasma systems. They dynamically align the 50Ω output impedance of RF generators with the variable impedance of plasma chambers, etchers, PECVD, and sputtering tools, minimizing reflected power and maximizing power transfer efficiency. Featuring fast tuning, robust shielding, and compact rack-mount designs, they ensure stable plasma ignition, consistent process performance, and 24/7 production reliability. Available in new, refurbished, and fully tested used conditions.
Key specifications:
- Automatic Impedance Matching: Real-time tuning to match 50Ω generator output to variable plasma load impedance; minimizes reflected power(typically <1%)
- Fast Tuning Speed: High-speed response(<1 second for most models)for rapid plasma ignition and load transient recovery
- Wide Frequency & Power Coverage: Supports 13.56MHz(standard), 27.12MHz, 40.68MHz; power ratings from 300W to 10kW
- Robust Construction: Heavy-duty metal enclosure with EMI/RFI shielding; air-cooled standard(water-cooled option for high-power models)
- Precision Components: High-quality variable capacitors, inductors, and stepper motors for long-cycle life(1,000,000+ cycles)
Applications:
- Semiconductor Manufacturing: RIE/ICP etching, PECVD/LPCVD deposition, plasma ashing, wafer cleaning, load lock systems
- Vacuum Coating: Sputtering, evaporation, PVD/CVD thin-film deposition for optics, displays, and solar cells
- Industrial Plasma Treatment: Surface activation, cleaning, etching, and coating for metals, plastics, and ceramics
- Research & Development: University labs, research institutions, and pilot production lines requiring stable RF plasma delivery
FAQ:
Q1:What is the product situation and warranty like?
A:Brand-new genuine items. 1-year warranty included.
Q2:What is your payment terms?
A:T/T, Paypal supported.
Q3: What is the delivery time for the product? Is there sufficient inventory?
A:Standard models in stock, shipped in 3–5 business days after payment. Scarce models require manufacturer ordering—contact customer service for timelines.
Q4:Shipping & Tracking
A:DHL/FedEx/UPS available.Tracking number + link provided post-shipment. Full-process monitoring by our team.
Q5:Packaging & Safety
A:Original brand packaging with reinforced protection (foam, sealed cartons, wooden crates for precision gear). Moisture & impact resistant.