Description:
MKS Baratron capacitance manometers are premium high-precision absolute vacuum/pressure transducers, the industry standard for semiconductor vacuum process equipment. Based on patented capacitance diaphragm sensing technology, it delivers gas-type independent pressure reading, completely unaffected by process gas composition. Widely matched with AMAT, LAM Research and mainstream wafer fabrication platforms, it provides ultra-stable closed-loop pressure control for etching, CVD, PVD, ALD and gas delivery systems, guaranteeing consistent chamber vacuum precision and improving production yield for semiconductor manufacturing.
Key specifications:
- Top-tier accuracy up to ±0.25% of reading, ultra-fine resolution of 0.01% Full Scale, excellent long-term stability and minimal drift to meet strict semiconductor process requirementsMKS.
- Diaphragm and wetted parts adopt Inconel® / Incoloy® nickel alloy or 316L stainless steel with full welding structure, resistant to corrosive specialty process gases. 100% leak tested before delivery for safe operation in harsh plasma environments.
- Covers ultra-fine vacuum to high pressure: 0.1 mTorr ~ 3000 PSIA. Heated models (45℃ / 100℃ optional) effectively prevent condensation of volatile process media to avoid measurement deviation.
Applications:
- Semiconductor fab equipment: AMAT Centura/Endura, LAM Kiyo/2300 etching systems
- Precision vacuum control for thin film deposition, plasma etching and ion implantation
- MFC gas cabinet, vacuum pumping system, leak detection and pressure safety interlock
- Solar PV, LED coating, pharmaceutical vacuum processing and laboratory high-precision vacuum testing
FAQ:
Q1:What is the product situation and warranty like?
A:Brand-new genuine items. 1-year warranty included.
Q2:What is your payment terms?
A:T/T, Paypal supported.
Q3: What is the delivery time for the product? Is there sufficient inventory?
A:Standard models in stock, shipped in 3–5 business days after payment. Scarce models require manufacturer ordering—contact customer service for timelines.
Q4:Shipping & Tracking
A:DHL/FedEx/UPS available.Tracking number + link provided post-shipment. Full-process monitoring by our team.
Q5:Packaging & Safety
A:Original brand packaging with reinforced protection (foam, sealed cartons, wooden crates for precision gear). Moisture & impact resistant.