Description:
MKS Diaphragm Valves are precision-engineered isolation & throttling control valves specially developed for high-purity gas, vacuum and critical fluid process industries, originating from MKS’s decades of precision fluid control technology for semiconductor, vacuum coating, biotech and fine chemical fields. Adopting core diaphragm isolation structure, the flexible diaphragm completely separates process medium from actuator and internal moving components, achieving zero external leakage, ultra-clean flow channel and precise on/off & proportional flow regulation, widely matched with MKS mass flow controllers, pressure transducers and process control systems for full-set industrial fluid solutions.
Key specifications:
- Diaphragm isolation design removes external leakage risk; smooth dead-space-free internal flow path avoids particle accumulation, meets ultra-high purity gas & sanitary production standards, ideal for clean-room and semiconductor wafer manufacturing.
- Optional diaphragm materials: Kalrez, Viton, Buna-N, EPDM, PTFE, compatible with inert gas, corrosive chemical gas, high-purity liquid, solvent and low-viscosity slurry; adapt working temp from -10℃ up to 150℃ for high-temperature process models.
- When paired with original MKS control driver & flow sensor, realizes high-accuracy closed-loop flow/pressure adjustment; adjustable flow scope covers 0.1sccm~50000sccm with outstanding low-flow control stability, minimum controllable flow down to 0.1% full scale.
- Available in manual, solenoid electric, pneumatic actuation (normally open/normally closed); end connections include VCR, KF flange, NPT thread, ISO standard flange to fit global mainstream pipeline specifications.
- Quick-replaceable diaphragm without full valve disassembly; compact all-in-one structure reduces spare part cost and equipment downtime, high cycle fatigue resistance for frequent switch working conditions.
- Strict leak testing before factory delivery, applicable for high/ultra-high vacuum pipeline isolation in coating, evaporation and thin-film deposition equipment.
Q1:What is the product situation and warranty like?
A:Brand-new genuine items. 1-year warranty included.
Q2:What is your payment terms?
A:T/T, Paypal supported.
Q3: What is the delivery time for the product? Is there sufficient inventory?
A:Standard models in stock, shipped in 3–5 business days after payment. Scarce models require manufacturer ordering—contact customer service for timelines.
Q4:Shipping & Tracking
A:DHL/FedEx/UPS available.Tracking number + link provided post-shipment. Full-process monitoring by our team.
Q5:Packaging & Safety
A:Original brand packaging with reinforced protection (foam, sealed cartons, wooden crates for precision gear). Moisture & impact resistant.