Description:
Original US-made MKS right-angle vacuum throttle butterfly valve, engineered for precise exhaust flow & chamber pressure regulation in high-vacuum processes. Unique 90° right-angle layout saves cabinet installation space, built-in high-speed stepping motor and high-resolution position encoder deliver ultra-stable linear pressure control. Stainless steel valve body with low-outgassing sealing, compatible with multiple flange standards, analog/digital communication options available. New original & fully refurbished tested units in stock, global DAP shipping and complete technical documentation support.
Key specifications:
- Vertical 90-degree airflow design, greatly reduces horizontal pipeline occupation, easy to install inside compact semiconductor cluster tools and vacuum cabinets.
- Patented non-linear drive mechanism optimizes flapper movement, realizes linear flow adjustment, minimal pressure overshoot, stable repeatable process recipes.
- High-torque stepping motor, full open/close within 200ms; thickened flapper prevents dust accumulation, long service life under etching & deposition corrosive gas environment.
- Full stainless steel valve body, low-outgassing fluorine rubber seal, meets high vacuum cleanroom standards; support heating version up to 200℃ to avoid process gas condensation.
- Multiple flange options: ISO-KF, ISO-F, CF; support 0-10V analog, RS232, EtherCAT, DeviceNet communication. Complete models in stock, offer wiring diagrams, operation manuals and remote technical guidance.
Q1:What is the product situation and warranty like?
A:Brand-new genuine items. 1-year warranty included.
Q2:What is your payment terms?
A:T/T, Paypal supported.
Q3: What is the delivery time for the product? Is there sufficient inventory?
A:Standard models in stock, shipped in 3–5 business days after payment. Scarce models require manufacturer ordering—contact customer service for timelines.
Q4:Shipping & Tracking
A:DHL/FedEx/UPS available.Tracking number + link provided post-shipment. Full-process monitoring by our team.
Q5:Packaging & Safety
A:Original brand packaging with reinforced protection (foam, sealed cartons, wooden crates for precision gear). Moisture & impact resistant.