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Brand New Lam Research 98008SA6F3P3 Mass Flow Controller

Brand New Lam Research 98008SA6F3P3 Mass Flow Controller

Brand New Lam Research 98008SA6F3P3 Mass Flow Controller

High precision, stable performance

Suitable for industrial automation

In stock & fast delivery worldwide

  • Item NO.:

    98008SA6F3P3
  • Order(MOQ):

    1
  • Payment:

    100% T/T
  • Product Origin:

    USA
  • Color:

    As Model
  • Shipping Port:

    Xiamen
  • Lead Time:

    2-3 days
  • Product Details

Description:

LAM Research MFCs are mission-critical components for semiconductor manufacturing, designed to regulate gas flow rates with exceptional accuracy in LAM’s etch, ash, and deposition systems. Built to meet the stringent demands of 5nm–7nm node fabrication, these controllers maintain consistent gas delivery, directly impacting wafer uniformity, yield, and process stability. Whether for fluorinated etch gases, inert carrier gases, or reactive deposition gases, LAM MFCs provide reliable, repeatable performance in 24/7 cleanroom environments.
 
 
Key specifications:
  1. LAM Research OEM mass flow controller (MFC)
  2. ±1% FS accuracy, ±0.1% repeatability for nanoscale processes
  3. Ranges: 10 sccm–10 slm; compatible with NF₃, HBr, O₂, N₂, Ar
  4. Interfaces: Analog (0–5V/4–20mA), DeviceNet, EtherCAT
  5. Wetted 316L SS/PTFE; 1/4" VCR fittings
 

 

Typical Applications:

  1. Semiconductor Etch: Dielectric, conductor, and silicon etch processes (2300 Versys, TCP9600)
  2. Deposition (CVD/PVD): Thin-film deposition for advanced nodes
  3. Plasma Processing: Ashing, stripping, and surface treatment
  4. Wafer Fabrication: 200mm/300mm fabs, 5nm–7nm processes

 

 

FAQ:

Q1:What is the product situation and warranty like?
A:Brand-new genuine items. 1-year warranty included.

Q2:What is your payment terms?
A:T/T, Paypal supported.

Q3: What is the delivery time for the product? Is there sufficient inventory?
A:Standard models in stock, shipped in 3–5 business days after payment. Scarce models require manufacturer ordering—contact customer service for timelines.

Q4:Shipping & Tracking
A:DHL/FedEx/UPS available.Tracking number + link provided post-shipment. Full-process monitoring by our team.

Q5:Packaging & Safety

 

A:Original brand packaging with reinforced protection (foam, sealed cartons, wooden crates for precision gear). Moisture & impact resistant.

 

 

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