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Brand New Lam Research 853-044013-153 VME Chassis

Brand New Lam Research 853-044013-153  VME Chassis

Brand New Lam Research 853-044013-153 VME Chassis

High precision, stable performance

Suitable for industrial automation

In stock & fast delivery worldwide

  • Item NO.:

    853-044013-153
  • Order(MOQ):

    1
  • Payment:

    100% T/T
  • Product Origin:

    USA
  • Color:

    As Model
  • Shipping Port:

    Xiamen
  • Lead Time:

    2-3 days
  • Product Details

Description:

Original VME64x control chassis, serving as the central control unit for Lam Research plasma etchers, including the 2300 KIYO, Exelan Flex, Versys, TCP 9600, and Rainbow series. Designed as a 6U 19” rack-mount enclosure with a 12‑slot VME64x backplane, it accommodates CPU, RF match, vacuum I/O, motion control, and EPD endpoint detection boards to manage etch recipes, plasma parameters, and tool safety interlocks.
 
 
 
Key specifications:
  1. OEM Lam Research VME chassis for etchers
  2. Compatible: 2300 KIYO, Flex, Versys, TCP 9600, Rainbow
  3. Form factor: 6U, 19” rack, 12‑slot VME64x backplane
  4. Integrated: CPU, RF, vacuum I/O, motion, EPD control boards
  5. Precision: 1μs timing sync, ±1% etch rate stability
  6. Construction: Heavy‑duty aluminum, EMI shielded, cleanroom safe
 

 

Typical Applications:

  1. Plasma etch process control for semiconductor fabs
  2. 200mm / 300mm wafer manufacturing (logic, DRAM, 3D NAND)
  3. High‑volume production & advanced node R&D

 

 

FAQ:

Q1:What is the product situation and warranty like?
A:Brand-new genuine items. 1-year warranty included.

Q2:What is your payment terms?
A:T/T, Paypal supported.

Q3: What is the delivery time for the product? Is there sufficient inventory?
A:Standard models in stock, shipped in 3–5 business days after payment. Scarce models require manufacturer ordering—contact customer service for timelines.

Q4:Shipping & Tracking
A:DHL/FedEx/UPS available.Tracking number + link provided post-shipment. Full-process monitoring by our team.

Q5:Packaging & Safety

 

A:Original brand packaging with reinforced protection (foam, sealed cartons, wooden crates for precision gear). Moisture & impact resistant.

 

 

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