Description:
Lam Research Temperature Control Board is a core thermal management component for semiconductor etch, deposition, and wafer processing systems. It delivers high-precision, multi-channel temperature regulation to maintain strict thermal uniformity across process chambers, electrostatic chucks (ESCs), and wafer stages. Engineered for 24/7 operation in high-vacuum, high-temperature, and plasma environments, it ensures consistent wafer temperature, stabilizes process recipes, and maximizes production yield. Genuine Lam OEM boards guarantee plug-and-play compatibility, precise calibration, and long-term reliability for advanced-node (2nm/3nm) semiconductor fabs.
Key specifications:
- Original Lam Research PCB assembly, fully compatible with Kiyo etchers, ExAL platforms, and CVD/PVD systems. Factory-calibrated and tested for seamless integration.
- Supports 16–24 channels (Pt100 RTD/thermocouple inputs); achieves ±0.1°C stability across 25–150°C range via auto-tuning PID algorithms.
- Closed-loop control for heating/cooling (TEC compatible); real-time sensor feedback with 500Hz sampling; ambient drift and sensor lag compensation.
- Vacuum-rated (≤1×10⁻⁶ Torr), EMI-shielded, vibration-resistant; operates reliably at 0–55°C with plasma and RF interference immunity.
- Modular, hot-swappable design for fast replacement; onboard diagnostics for temperature, sensor health, and fault logging; reduces unplanned downtime.
Typical Applications:
- Lam Research plasma etching systems (Kiyo, ExAL, 9000 series)
- CVD/PVD/ALD thin film deposition equipment
- 200mm / 300mm wafer process chambers & ESCs
- Advanced logic/memory fabs (2nm/3nm nodes)
- Semiconductor fab maintenance, spare parts & upgrades
FAQ:
Q1:What is the product situation and warranty like?
A:Brand-new genuine items. 1-year warranty included.
Q2:What is your payment terms?
A:T/T, Paypal supported.
Q3: What is the delivery time for the product? Is there sufficient inventory?
A:Standard models in stock, shipped in 3–5 business days after payment. Scarce models require manufacturer ordering—contact customer service for timelines.
Q4:Shipping & Tracking
A:DHL/FedEx/UPS available.Tracking number + link provided post-shipment. Full-process monitoring by our team.
Q5:Packaging & Safety
A:Original brand packaging with reinforced protection (foam, sealed cartons, wooden crates for precision gear). Moisture & impact resistant.